Books, publications, brochures
New books
Handbook of Silicon Based MEMS Materials & Technologies
Microelectromechanical Systems (MEMS) is the technology of the very small, and merges at the nanoscale into "Nanoelectromechanical Systems" ( NEMS ) and Nanotechnology.The new handbook is a comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.
![]() |
Key topics covered include: * Silicon as MEMS material * Material properties and measurement techniques * Analytical methods used in materials characterization * Modeling in MEMS * Measuring MEMS * Micromachining technologies in MEMS * Encapsulation of MEMS components * Emerging process technologies, including ALD and porous silicon |
Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities.
Editors:
* Veikko Lindroos, Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland.* Markku Tilli, Senior Vice President of Research at Okmetic, Vantaa, Finland.
* Ari Lehto, Professor of Silicon Technology at Helsinki University of Technology, Finland.
* Teruaki Motooka, Professor at the Department of Materials Science and Engineering, Kyushu University, Japan.
More information:
Elsevier.com/Books/Handbook of Silicon Based MEMS Materials and Technologies/Lindroos
Finnish-Komi bioenergy cooperation advances
The bioenergy cooperation between Finland and the Russian Republic of Komi makes progress. An example of current efforts is the plan to convert forest industries' by-products into pellets. Bioenergy is a part of wider Finland-Komi cooperation that includes forestry and forest industry, energy efficiency, energy saving, fishing industry, tourism and a few other areas.
Aalto aims to become one of the world's top universities
Aalto University is a new multidisciplinary science and art community in the fields of science, economics, and art and design. The new university is founded on Finnish strengths, and its goal is to develop as a unique entity to become one of the world's top universities. The cornerstones of Aalto University are its strengths in education and research – with cross-scientific opportunities.
Aalto University is created through a merger between the Helsinki School of Economics, the University of Art and Design Helsinki and the Helsinki University of Technology. The official inauguration of University took place in Finland on 8 January 2010.
OPTIONS AND HELP
Email to a friend
To email this article to a friend, click:
http://www.energy-enviro.fi/index.php?PAGE=58&ARTICLE_ID=25&emailSubscribe
To subscribe to our mailing list, visit:
http://www.energy-enviro.fi/index.php?PAGE=59&subscribeUnsubscribe
To unsubscribe mailing list, click:
http://www.energy-enviro.fi/index.php?PAGE=60&unsubscribe











